The ORS ion is the first high speed in situ sensor to monitor Thin Film Growth , Temperature and Wafer Curvature with ONE fast , compact and accurate sensor.
Accurate Wafer curvature measurement
The ORS ion not only measures spherical bow but importantly non-spherical bow . Wafer curvature is clearly displayed ensuring that post processing requirements are met.
Fast data acquisition
The ORS ion offers the fastest data acquisition rate of any commercially available in-situ sensor.
Common interface
Ideally suited to any MOVPE reactor providing a common interface irrespective of reactor type or make. Compatible with Turbodisk ™ ,Showerhead and Planetary™ type reactors.
Installation
The small footprint and the need for only one optical port means the minimum of space is needed on your reactor.
Downloads
For more information contact us on:
t: +44 (0)1745 535188 f: +44 (0)1745 535186
e: enquiry@ors-ltd.com
ORS ion – Features and benefits
- Production ready sensor head, cables and base station - no optical fibres
- Control multiple sensors from the same GUI
- Accurate to 0.3km radius of curvature
- Control of wafer curvature signifcantly improves process performance
- High speed acquisition means compatible with susceptor speeds of 5-1500 rpm
- A common interface for multi-reactor type compatibility
- For large single wafers measurements can be made at a fixed radius
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