The ORS eye combines the laser reflectance measurement of the ORS ref with pyrometry.
Accurate Laser reflectance and emissivity corrected temperature measurement for production line processes.
The ORS eye is a robust industrial sensor ideally suited to large scale MOVPE reactors used in manufacturing. Compatible with Aixtron CCS , Veeco Turbodisk ™ and Planetary ™ type reactors.
High Speed
Data High speed data acquisition rates ensuring that the wafers are monitored on each rotation of the reactor.
Multiple Heads
Up to 4 sensors can be installed onto a single process chamber, controlled by 1 base unit , providing uniform information across the susceptor
Compact design
The ORS eye has a small footprint that is compatible with the majority of MOVPE reactors and is suitable for the monitoring of a wide range of III-V and II-VI applications, solar cells, and GaAs/InP for electronics, LEDs and Telecom.
Options
The ORS eye design can accommodate an optional 3rd laser to monitor two reflectance wavelengths, for example 405nm laser for GaN surface roughness.
Downloads
For more information contact us on:
t: +44 (0)1745 535188 f: +44 (0)1745 535186
e: enquiry@ors-ltd.com
ORS eye – Features and benefits
- 635nm laser based reflectance measurement as standard
- 950nm pyrometry measurement as standard
- 50nm laser based reflectance measurement for emissivity correction
- Optional 3rd laser for 2nd reflectance wavelength (EpiEYE blue – 405nm)
- Option – longer wavelength lasers are available
- Temperature range from 450°C to 1500°C (depending on reactor type)
- Fast 10kHz sample rate for monitoring of all wafers on each susceptor rotation
- Scope mode (line scan) for reflectance uniformity profile of complete ring of wafers
- Fixed angle mode for measurement of reflectance and temperature at several positions on the same wafer and multiple wafers
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