The ORS arc in situ wafer bow sensor will significantly improve your yield and uniformity.
The ORS arc has been developed to help you to understand how wafer curvature evolves during your process.
Accurate Measurement
The ORS arc not only measures spherical bow but more importantly non-spherical bow.
Multi Sensor Configuration
Flexible control software allows for multi sensor control and configuration. This enables easy alignment of wafer bow with reflectance and temperature measurements from the same wafer.
Fast data acquisition
Whether your stage rotates at 5 or 1500rpm, every wafer is monitored on each rotation of your main stage. The ORS arc offers the fastest data acquisition rate of any commercially available in-situ sensor.
Common interface
Ideally suited to any MOVPE reactor providing a common interface irrespective of reactor type or make. Compatible with Planetary™, Showerhead and Turbodisc™ reactors.
Quality
ORS is ISO 9001 accredited and the ORS arc sensor is fully CE marked.
Installation
Mounting solutions are available for all configurations. The small footprint means the minimum of space is needed on your reactor.
Downloads
For more information contact us on:
t: +44 (0)1745 535188 f: +44 (0)1745 535186
e: enquiry@ors-ltd.com
ORS arc - features and benefits
- Accurate to 0.3 km-1 radius of curvature
- Quick and easy to install
- Also suitable for Arsenides and Phosphides
- Control of wafer bow significantly improves process performance
- Monitors across the whole wafer
- No focusing required
- High speed acquisition means compatible with susceptor speeds of 5 –1500 rpm
- A common interface for multi-reactor type compatibility
- For large single wafers measurements can be made mid radius
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